Design for e-beam testability β A demand
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K.D. Herrmann; E. Kubalek
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Article
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1987
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Elsevier Science
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English
β 883 KB
Based on the trends in development of integrated circuits {IC) until the year 2000 it is shown that, presuming the present capability of electron beam test systems, in future an electron beam test {EBT) will not be practicable anymore. This is mainly due to long measurement times, large measurement