𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Temperature-programmed-desorption study of the process of atomic deuterium adsorption onto Si(100)2×1

✍ Scribed by M. Suemitsu; H. Nakazawa; N. Miyamoto


Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
425 KB
Volume
82-83
Category
Article
ISSN
0169-4332

No coin nor oath required. For personal study only.


📜 SIMILAR VOLUMES


Adsorption of hydrogen atoms on the Si(1
✍ Christine J. Wu; Emily A. Carter 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 558 KB

The adsorption of atomic hydrogen on the reconstructed Si ( lOO)-2 x I surface is studied using embedded Si clusters as models of an extended Si surface. Analytic gradients of generalized valence bond (GVB) wavefunctions are used to predict equilibrium structures and harmonic vibrational frequencies

Dissociative adsorption of monomethylsil
✍ Hideki Nakazawa; Maki Suemitsu 📂 Article 📅 2000 🏛 Elsevier Science 🌐 English ⚖ 163 KB

## Ž . Dissociative adsorption of monomethylsilane MMS , a promising precursor gas for low-temperature SiC, has been Ž . Ž . investigated on Si 100 by using temperature-programmed desorption TPD method after its comparison with Hr and Ž . Ž . C H rSi 100 surfaces. For both MMSr and C H rSi 100 ,