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Temperature-independent pressure sensors using polycrystalline silicon strain gauges

✍ Scribed by H. Schäfer; V. Graeger; R. Kobs

Publisher: Elsevier Science
Year: 1989
Weight: 441 KB
Volume: 17
Category: Article
ISSN: 0250-6874
DOI: 10.1016/0250-6874(89)80040-x

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