Temperature dependent IBIC study of 4H–SiC Schottky diodes
✍ Scribed by E. Vittone; V. Rigato; P. Olivero; F. Nava; C. Manfredotti; A. LoGiudice; Y. Garino; F. Fizzotti
- Publisher
- Elsevier Science
- Year
- 2005
- Tongue
- English
- Weight
- 395 KB
- Volume
- 231
- Category
- Article
- ISSN
- 0168-583X
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✦ Synopsis
Ion beam induced charge collection measurements have been performed on an epitaxial 4H-SiC Schottky diode with a focussed 1.5 MeV H beam in the temperature range of 120-380 K. The experimental procedure consisted in measuring the charge collection efficiency (CCE) at different bias voltages (V) for each fixed temperature. The CCE versus V curves were analyzed in terms of the Schockley-Ramo-Gunn theory and the minority carrier (hole) diffusion length was obtained as a function of temperature.
📜 SIMILAR VOLUMES
The Charge Collection Efficiency (CCE) in 4H-SiC epitaxial Schottky diodes is studied as a function of the applied reverse bias. Three SiC types, with different doping concentrations, were used to detect 12 C ions at 14.2, 28.1 and 37.6 MeV. In two SiC types we observe minority charge carriers, gene