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Temperature dependence of the sticking coefficient in atomic layer deposition

✍ Scribed by M. Rose; J.W. Bartha; I. Endler

Publisher: Elsevier Science
Year: 2010
Tongue: English
Weight: 479 KB
Volume: 256
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2010.01.025

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