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Method to determine the sticking coefficient of precursor molecules in atomic layer deposition

✍ Scribed by M. Rose; J.W. Bartha

Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 234 KB
Volume: 255
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2009.02.055

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