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Temperature dependence of stresses in GaN/AlN/6H–SiC(0 0 0 1) structures: correlation between AlN buffer thickness and intrinsic stresses in GaN

✍ Scribed by J Keckes; G Koblmueller; R Averbeck

No coin nor oath required. For personal study only.

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Temperature dependence of stresses in GaN/AlN/6H–SiC(0&#xa0;0&#xa0;0&#xa0;1) structures: correlation between AlN buffer thickness and intrinsic stresses in GaN