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Impact of surface step heights of 6H–SiC (0 0 0 1) vicinal substrates in heteroepitaxial growth of 2H–AlN

✍ Scribed by H. Okumura; M. Horita; T. Kimoto; J. Suda


Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
623 KB
Volume
254
Category
Article
ISSN
0169-4332

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