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Temperature dependence of Hall mobility in indium–tin oxide thin films

✍ Scribed by Morris, J. E.; Ridge, M. I.; Bishop, C. A.; Howson, R. P.


Book ID
121302321
Publisher
American Institute of Physics
Year
1980
Tongue
English
Weight
444 KB
Volume
51
Category
Article
ISSN
0021-8979

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Indium-tin-oxide (ITO) thin films and ITO/Ag alloy/ITO multilayered thin films were deposited on glass substrates using a vertical in-line multilayer sputtering system. Ceramic ITO targets were used for the deposition of ITO layers at low substrate temperature of 100 • C. It was observed that the s