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High temperature stability of indium tin oxide thin films

✍ Scribed by Otto J. Gregory; Qing Luo; Everett E. Crisman

Book ID
108388355
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
345 KB
Volume
406
Category
Article
ISSN
0040-6090

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✍ Zuqiang Qi; Xuekang Chen; Chuizhen Fan; Weiping Chai πŸ“‚ Article πŸ“… 2009 πŸ› Elsevier Science 🌐 English βš– 425 KB

Indium-tin-oxide (ITO) thin films and ITO/Ag alloy/ITO multilayered thin films were deposited on glass substrates using a vertical in-line multilayer sputtering system. Ceramic ITO targets were used for the deposition of ITO layers at low substrate temperature of 100 β€’ C. It was observed that the s