𝔖 Bobbio Scriptorium
✦   LIBER   ✦

A study of low temperature crystallization of amorphous thin film indium–tin–oxide

✍ Scribed by Paine, David C.; Whitson, T.; Janiac, D.; Beresford, R.; Yang, Cleva Ow; Lewis, Brian

Book ID
118043192
Publisher
American Institute of Physics
Year
1999
Tongue
English
Weight
444 KB
Volume
85
Category
Article
ISSN
0021-8979

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Low temperature processing of high condu
Low temperature processing of high conductivity and high transparency indium–tin-oxide/Ag alloy/indium–tin-oxide multilayered thin films
✍ Zuqiang Qi; Xuekang Chen; Chuizhen Fan; Weiping Chai 📂 Article 📅 2009 🏛 Elsevier Science 🌐 English ⚖ 425 KB

Indium-tin-oxide (ITO) thin films and ITO/Ag alloy/ITO multilayered thin films were deposited on glass substrates using a vertical in-line multilayer sputtering system. Ceramic ITO targets were used for the deposition of ITO layers at low substrate temperature of 100 • C. It was observed that the s