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Temperature dependence of electrical properties of Ga-doped ZnO films deposited by ion plating with DC arc discharge

โœ Scribed by Terasako, T.; Song, H.; Makino, H.; Shirakata, S.; Yamamoto, T.


Book ID
122702439
Publisher
Elsevier Science
Year
2013
Tongue
English
Weight
871 KB
Volume
528
Category
Article
ISSN
0040-6090

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Effects of substrate temperature on crys
โœ Takahiro Yamada; Aki Miyake; Seiichi Kishimoto; Hisao Makino; Naoki Yamamoto; Te ๐Ÿ“‚ Article ๐Ÿ“… 2007 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 261 KB

The effects of substrate temperature, T s , on the crystallinity and the electrical properties of Ga-doped ZnO films (GZO) with a thickness of 200 nm were investigated. GZO films were prepared on glass substrates at various T s in the range from 150 to 400 ยฐC by ion-plating method with DC arc discha