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Effect of substrate temperature on structural, electrical and optical properties of Ga-doped ZnO films on cycro olefin polymer substrate by ion plating deposition

✍ Scribed by Aki Miyake; Takahiro Yamada; Hisao Makino; Naoki Yamamoto; Tetsuya Yamamoto


Book ID
108290130
Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
536 KB
Volume
517
Category
Article
ISSN
0040-6090

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Effects of substrate temperature on crys
✍ Takahiro Yamada; Aki Miyake; Seiichi Kishimoto; Hisao Makino; Naoki Yamamoto; Te πŸ“‚ Article πŸ“… 2007 πŸ› Elsevier Science 🌐 English βš– 261 KB

The effects of substrate temperature, T s , on the crystallinity and the electrical properties of Ga-doped ZnO films (GZO) with a thickness of 200 nm were investigated. GZO films were prepared on glass substrates at various T s in the range from 150 to 400 Β°C by ion-plating method with DC arc discha