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Temperature and angular effects on the channelled implantation of Er into Si〈1 1 1〉

✍ Scribed by S.M Hogg; A Vantomme; M.F Wu; B Pipeleers; M Swart


Book ID
114164578
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
103 KB
Volume
175-177
Category
Article
ISSN
0168-583X

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