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Tem study of microdefects in epitaxially grown silicon

✍ Scribed by C.W.T. Bulle-Lieuwma; M.P.A. Viegers

Publisher: Elsevier Science
Year: 1984
Tongue: English
Weight: 95 KB
Volume: 14
Category: Article
ISSN: 0304-3991
DOI: 10.1016/0304-3991(84)90263-8

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