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Technology and application of thin silicide films in semiconductor devices and integrated microcircuits

โœ Scribed by V.M. Koleshko; V.F. Belitsky; N.A. Dolguij; Yu.Ch. Dulinets; V.G. Glebovsky


Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
844 KB
Volume
42
Category
Article
ISSN
0042-207X

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