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Applications of scanning tunneling microscopy to the characterization of semiconductor technologies and devices

✍ Scribed by H. Salemink; O. Albrektsen

Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 505 KB
Volume: 15
Category: Article
ISSN: 0167-9317
DOI: 10.1016/0167-9317(91)90191-f

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## Abstract Scanning probe microscopy (SPM) is a widely used experimental technique for characterizing and fabricating nanostructures on surfaces. In particular, due to its ability to spatially map variations in materials properties with nanometer spatial resolution, SPM is particularly well suited