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Technological aspects of epitaxial CoSi2 layers for CMOS

✍ Scribed by A. Lauwers; R.J. Schreutelkamp; B. Brijs; H. Bender; K. Maex


Book ID
103616523
Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
812 KB
Volume
73
Category
Article
ISSN
0169-4332

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