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Ion beam synthesis of epitaxial CoSi2 layers and the redistribution of dopants within them

✍ Scribed by Karen J. Reeson; Russell S. Spraggs; Russell M. Gwilliam; Brian J. Sealy

Book ID: 113283424
Publisher: Elsevier Science
Year: 1992
Tongue: English
Weight: 734 KB
Volume: 68
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(92)96108-b

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