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Techniques for sputtering single and multilayer films of uniform resistivity

✍ Scribed by L.I. Maissel; J.H. Vaughn

Publisher: Elsevier Science
Year: 1963
Tongue: English
Weight: 408 KB
Volume: 13
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(63)92556-9

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