Techniques for sputtering single and multilayer films of uniform resistivity : L.I. Maissel and J.H. Vaughn, Vacuum, 13 (10), Oct. 1963, 421–423

• Publisher: Elsevier Science
• Year: 1964
• Tongue: English
• Weight: 90 KB
• Volume: 14
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(64)90850-4