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A rotating substrate holder for the production of uniform thin amorphous films and multilayer structures

✍ Scribed by JSG Taylor; N Piggins

Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 145 KB
Volume: 39
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(89)90709-4

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