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Technical Challenges and Progress in Fluidized Bed Chemical Vapor Deposition of Polysilicon

✍ Scribed by Jianlong LI; Guanghui CHEN; Pan ZHANG; Weiwen WANG; Jihai DUAN

Book ID: 114338564
Publisher: Elsevier Science
Year: 2011
Tongue: English
Weight: 262 KB
Volume: 19
Category: Article
ISSN: 1004-9541
DOI: 10.1016/s1004-9541(11)60052-9

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