Plasma Enhanced Chemical Vapor Deposition on Powders in a Low Temperature Plasma Fluidized Bed

✍ Scribed by Christian Bayer; Martin Karches; Andrew Matthews; Philipp Rudolf von Rohr

• Publisher: John Wiley and Sons
• Year: 1998
• Tongue: English
• Weight: 189 KB
• Volume: 21
• Category: Article
• ISSN: 0930-7516
• DOI: 10.1002/(sici)1521-4125(199805)21:5<427::aid-ceat427>3.0.co;2-h