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Chemical vapor deposition and homogeneous nucleation in fluidized bed reactors: silicon from silane

✍ Scribed by S. Lai; M.P. Dudukovic'; P.A. Ramachandran

Book ID: 107730232
Publisher: Elsevier Science
Year: 1986
Tongue: English
Weight: 704 KB
Volume: 41
Category: Article
ISSN: 0009-2509
DOI: 10.1016/0009-2509(86)87140-8

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