Tapered microvalves fabricated by off-axis X-ray exposures

✍ Scribed by T. W. Tsuei; R. L. Wood; C. Khan Malek; M. M. Donnelly; R. B. Fair

• Book ID: 106186334
• Publisher: Springer-Verlag
• Year: 1998
• Tongue: English
• Weight: 588 KB
• Volume: 4
• Category: Article
• ISSN: 0946-7076
• DOI: 10.1007/s005420050131