Submicron-scale surface acoustic wave resonators fabricated by high aspect ratio X-ray lithography and aluminum lift-off

✍ Scribed by Sven Achenbach; David Klymyshyn; Timo Mappes; Anton Kachayev; Venkat Subramanian; Garth Wells; Jürgen Mohr

• Publisher: Springer-Verlag
• Year: 2008
• Tongue: English
• Weight: 288 KB
• Volume: 14
• Category: Article
• ISSN: 0946-7076
• DOI: 10.1007/s00542-007-0498-7