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Tailoring the stress-depth profile in thin films; the case of γ’-Fe4N1-x

✍ Scribed by M. Wohlschlögel; U. Welzel; E.J. Mittemeijer


Book ID
113937185
Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
546 KB
Volume
520
Category
Article
ISSN
0040-6090

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Optical investigations of self-polarized PbZr 0.235 Ti 0.765 O 3 (PZT) films deposited onto Si/SiO 2 /adhesion layer/(111) Pt substrate by RF sputtering are presented in this work. Measurements were performed with a spectral ellipsometer working in rotating analyzer mode. To obtain the temperature d