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Table top nanopatterning with extreme ultraviolet laser illumination

✍ Scribed by M.G. Capeluto; P. Wachulak; M.C. Marconi; D. Patel; C.S. Menoni; J.J. Rocca; C. Iemmi; E.H. Anderson; W. Chao; D.T. Attwood

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Nanopatterning in a compact setup using

✍ P. W. Wachulak; M. G. Capeluto; C. S. Menoni; J. J. Rocca; M. C. Marconi 📂 Article 📅 2008 🏛 SP Versita 🌐 English ⚖ 937 KB

Sub 400 nm spatial resolution extreme ul

✍ Wachulak, P. W.; Bartels, R. A.; Marconi, M. C.; Menoni, C. S.; Rocca, J. J.; Lu 📂 Article 📅 2006 🏛 Optical Society of America 🌐 English ⚖ 620 KB

Patterning of nano-scale arrays by table

✍ Wachulak, P. W.; Capeluto, M. G.; Marconi, M. C.; Menoni, C. S.; Rocca, J. J. 📂 Article 📅 2007 🏛 Optical Society of America 🌐 English ⚖ 795 KB

Microscopy of extreme ultraviolet lithog

✍ Brizuela, F.; Wang, Y.; Brewer, C. A.; Pedaci, F.; Chao, W.; Anderson, E. H.; Li 📂 Article 📅 2009 🏛 Optical Society of America 🌐 English ⚖ 299 KB

Table-top reflectometer in the extreme u

✍ Banyay, Matus; Juschkin, Larissa 📂 Article 📅 2009 🏛 American Institute of Physics 🌐 English ⚖ 502 KB

Nanoimaging with a compact extreme-ultra

✍ Vaschenko, G.; Brizuela, F.; Brewer, C.; Grisham, M.; Mancini, H.; Menoni, C. S. 📂 Article 📅 2005 🏛 Optical Society of America 🌐 English ⚖ 201 KB