Patterning of nano-scale arrays by table-top extreme ultraviolet laser interferometric lithography

✍ Scribed by Wachulak, P. W.; Capeluto, M. G.; Marconi, M. C.; Menoni, C. S.; Rocca, J. J.

• Book ID: 115407289
• Publisher: Optical Society of America
• Year: 2007
• Tongue: English
• Weight: 795 KB
• Volume: 15
• Category: Article
• ISSN: 1094-4087
• DOI: 10.1364/OE.15.003465