✦ LIBER ✦
Large area interference lithography using a table-top extreme ultraviolet laser: a systematic study of the degree of mutual coherence
✍ Scribed by Zuppella, P; Luciani, D; Tucceri, P; De Marco, P; Gaudieri, A; Kaiser, J; Ottaviano, L; Santucci, S; Reale, A
- Book ID
- 120618235
- Publisher
- Institute of Physics
- Year
- 2009
- Tongue
- English
- Weight
- 594 KB
- Volume
- 20
- Category
- Article
- ISSN
- 0957-4484
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