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System for illumination of an EUV-nanolithograph mask

✍ Scribed by S. Yu. Zuev; A. E. Pestov; V. N. Polkovnikov; N. N. Salashchenko; A. S. Skryl’; I. L. Strulya; M. N. Toropov; N. I. Chkhalo

Book ID: 110203436
Publisher: Pleiades Publishing
Year: 2011
Tongue: English
Weight: 446 KB
Volume: 5
Category: Article
ISSN: 1027-4510
DOI: 10.1134/s1027451011060218

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