𝔖 Bobbio Scriptorium
✦   LIBER   ✦

A stand for a projection EUV nanolithographer-multiplicator with a design resolution of 30 nm

✍ Scribed by D. G. Volgunov; I. G. Zabrodin; B. A. Zakalov; S. Yu. Zuev; I. A. Kas’kov; E. B. Kluenkov; A. E. Pestov; V. N. Polkovnikov; N. N. Salashchenko; L. A. Suslov; M. N. Toropov; N. I. Chkhalo


Book ID
111502102
Publisher
Allerton Press Inc
Year
2011
Tongue
English
Weight
416 KB
Volume
75
Category
Article
ISSN
1062-8738

No coin nor oath required. For personal study only.


📜 SIMILAR VOLUMES


Fabrication of a free standing resolutio
✍ J.A. van Kan; P.G. Shao; P. Molter; M. Saumer; A.A. Bettiol; T. Osipowicz; F. Wa 📂 Article 📅 2005 🏛 Elsevier Science 🌐 English ⚖ 331 KB

With recent advances in nuclear microscopy, proton beam writing and the recent development of MeV ion nano probe facilities it is becoming increasingly important to have resolution standards with a high degree of side wall verticality. We present here a way of producing a high quality free standing