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A stand for a projection EUV nanolithographer-multiplicator with a design resolution of 30 nm

✍ Scribed by D. G. Volgunov; I. G. Zabrodin; B. A. Zakalov; S. Yu. Zuev; I. A. Kas’kov; E. B. Kluenkov; A. E. Pestov; V. N. Polkovnikov; N. N. Salashchenko; L. A. Suslov; M. N. Toropov; N. I. Chkhalo

Book ID: 111502102
Publisher: Allerton Press Inc
Year: 2011
Tongue: English
Weight: 416 KB
Volume: 75
Category: Article
ISSN: 1062-8738
DOI: 10.3103/s1062873811010278

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