✦ LIBER ✦
Design of the aspheric Schwarzschild lens for a nanolithographer with the operating wavelength λ = 13.5 nm
✍ Scribed by N. N. Salashchenko; A. S. Skryl’; M. N. Toropko; N. I. Chkhalo
- Book ID
- 110203431
- Publisher
- Pleiades Publishing
- Year
- 2011
- Tongue
- English
- Weight
- 197 KB
- Volume
- 5
- Category
- Article
- ISSN
- 1027-4510
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