✦ LIBER ✦
Project for manufacturing a Russian EUV nanolithographer for the fabrication of chips according to technological standards of 22 nm
✍ Scribed by N. N. Salashchenko; N. I. Chkhalo
- Book ID
- 111502097
- Publisher
- Allerton Press Inc
- Year
- 2011
- Tongue
- English
- Weight
- 838 KB
- Volume
- 75
- Category
- Article
- ISSN
- 1062-8738
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