✦ LIBER ✦

Synthesis of silicon oxynitride

✍ Scribed by I. Ya. Guzman; T. N. Purusova; D. N. Poluboyarinov; M. N. Karpilovskaya

Book ID: 112507319
Publisher: Springer US
Year: 1970
Tongue: English
Weight: 481 KB
Volume: 11
Category: Article
ISSN: 1573-9139
DOI: 10.1007/bf01290078

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