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Synthesis of silicon oxynitride from a polymeric precursor

✍ Scribed by Ga-Er Yu; J. Parrick; M. Edirisinghe; D. Finch; B. Ralph

Book ID: 104735189
Publisher: Springer
Year: 1993
Tongue: English
Weight: 402 KB
Volume: 28
Category: Article
ISSN: 0022-2461
DOI: 10.1007/bf00351262

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