Synthesis of silicon oxynitride from a polymeric precursor

✍ Scribed by Ga -Er Yu; J. Parrick; M. Edirisinghe; D. Finch; B. Ralph

• Book ID: 104743926
• Publisher: Springer
• Year: 1994
• Tongue: English
• Weight: 564 KB
• Volume: 29
• Category: Article
• ISSN: 0022-2461
• DOI: 10.1007/bf00368946

✦ Synopsis

Proton nuclear magnetic resonance (1H NMR) spectroscopy, Fourier transform infrared (FT-IR) spectroscopy and gas chromatography (GC) have been used to study the products of ammonolysis of dichloromethylsilane in diethyl ether at 0 ~ Results indicate that the major products are trimethylcyclotrisilazane and tetramethylcyclotetrasilazane. Hydrolysis of the cyclosilazanes has also been qualitatively investigated. A simple and useful method for the identification of cyclosilazanes has been developed using the 1H NMR technique.