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Synthesis of Silicon Nanotubes on Porous Alumina Using Molecular Beam Epitaxy

✍ Scribed by S.Y. Jeong; J.Y. Kim; H.D. Yang; B.N. Yoon; S.-H. Choi; H.K. Kang; C.W. Yang; Y.H. Lee

Publisher
John Wiley and Sons
Year
2003
Tongue
English
Weight
266 KB
Volume
15
Category
Article
ISSN
0935-9648

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Surface hydrogen and growth mechanisms are investigated for synchrotron radiation (SR)assisted gas source molecular beam epitaxy (SR-GSMBE) using Si 2 H 6 on the Si(100) surface in the low-temperature region. The surface silicon hydrides (deuterides) are monitored in situ during the epitaxial growth