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Synthesis of Silicon Carbide Thin Films with Polycarbosilane (PCS)

✍ Scribed by Paolo Colombo; Thomas E. Paulson; Carlo G. Pantano

Book ID
110827309
Publisher
John Wiley and Sons
Year
2005
Tongue
English
Weight
337 KB
Volume
80
Category
Article
ISSN
0002-7820

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