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Synthesis of silicon carbide films by combined implantation with sputtering techniques

✍ Scribed by Gaobao Li; Jizhong Zhang; Qingli Meng; Wenzhi Li

Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 940 KB
Volume: 253
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2007.04.014

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