Sputtering process of a silicon carbide surface with energetic ions by means of an AES-SIMS-FDS combined system

✍ Scribed by Mamoru Mohri; Kuniaki Watanabe; Toshiro Yamashina

• Publisher: Elsevier Science
• Year: 1978
• Tongue: English
• Weight: 590 KB
• Volume: 75
• Category: Article
• ISSN: 0022-3115
• DOI: 10.1016/0022-3115(78)90023-5