Application of AES-SIMS (IMA)-FDS combined systems to physical and chemical sputtering processes of graphite and silicon carbide surfaces with energetic ions

✍ Scribed by Toshiro Yamashina; Mamoru Mohri; Kuniaki Watanabe; Hiroshi Doi; Kazunobu Hayakawa

• Publisher: Elsevier Science
• Year: 1978
• Tongue: English
• Weight: 168 KB
• Volume: 76-77
• Category: Article
• ISSN: 0022-3115
• DOI: 10.1016/0022-3115(78)90138-1