Directional growth of single-crystal silicon films across silicon carbide by a moving deposition-zone technique

✍ Scribed by R.L. Tallman; T.L. Chu; J.J. Oberly

• Publisher: Elsevier Science
• Year: 1966
• Tongue: English
• Weight: 319 KB
• Volume: 9
• Category: Article
• ISSN: 0038-1101
• DOI: 10.1016/0038-1101(66)90063-3