Directional growth of single-crystal silicon films across silicon carbide by a moving deposition-zone technique : R. L. Tallman, T. L. Chu and J. J. Oberly, Solid St. Electron.9 (1966), p. 327

• Publisher: Elsevier Science
• Year: 1967
• Tongue: English
• Weight: 93 KB
• Volume: 6
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(67)90298-3