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Synthesis of plasma-polymerized tetraethoxysilane and hexamethyldisiloxane films prepared by atmospheric pressure glow discharge

✍ Scribed by Sawada, Y; Ogawa, S; Kogoma, M

Book ID
124090721
Publisher
Institute of Physics
Year
1995
Tongue
English
Weight
539 KB
Volume
28
Category
Article
ISSN
0022-3727

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