Characterization of Plasma Polymerized Hexamethyldisiloxane Films Prepared by Arc Discharge
✍ Scribed by Lazauskas, Algirdas; Baltrusaitis, Jonas; Grigaliūnas, Viktoras; Jucius, Dalius; Guobienė, Asta; Prosyčevas, Igoris; Narmontas, Pranas
- Book ID
- 121557354
- Publisher
- Springer
- Year
- 2013
- Tongue
- English
- Weight
- 794 KB
- Volume
- 34
- Category
- Article
- ISSN
- 0272-4324
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📜 SIMILAR VOLUMES
Nanometer-size holes in plasma-polymerized thin films were characterized by variable-energy positron lifetime spectroscopy for the first time. Hexamethyldisiloxane (HMDSiO) was plasma-polymerized at different discharge powers (30 -105 W) and monomer pressures (1.0 -4.9 Pa). The positron lifetime spe
Thin plasma polymer films were deposited from several liquid monomers (mainly siloxane-type monomers) in a low-temperature cascade arc torch (CAT) reactor. The effects of monomer structures and plasma parameters on internal stress in the films were experimentally studied. By appropriately adjusting