Internal stress in plasma polymer films prepared by cascade arc torch polymerization
✍ Scribed by Q. S. Yu; H. K. Yasuda
- Publisher
- John Wiley and Sons
- Year
- 1999
- Tongue
- English
- Weight
- 229 KB
- Volume
- 37
- Category
- Article
- ISSN
- 0887-624X
No coin nor oath required. For personal study only.
✦ Synopsis
Thin plasma polymer films were deposited from several liquid monomers (mainly siloxane-type monomers) in a low-temperature cascade arc torch (CAT) reactor. The effects of monomer structures and plasma parameters on internal stress in the films were experimentally studied. By appropriately adjusting these factors, the internal stress in the film was reduced nearly two orders of magnitude from 10 9 to 10 7 dyn/cm 2 . It was noted that the polymer films prepared from siloxane-type monomers showed lower internal stress than their hydrocarbon counterpart. Fourier transforminfrared spectroscopy (FTIR) studies indicated that a large amount of SiOOOSi structure from siloxane monomers, which are very flexible bonds, was preserved in the resultant plasma polymers. Ellipsometry results suggested that the internal stress can be qualitatively correlated with the refractive index of the plasma polymer film.