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Synthesis of phosphorus-carbide thin films by magnetron sputtering

✍ Scribed by A. Furlan; G. K. Gueorguiev; Zs. Czigány; H. Högberg; S. Braun; S. Stafström; L. Hultman

Book ID: 112182713
Publisher: John Wiley and Sons
Year: 2008
Tongue: English
Weight: 266 KB
Volume: 2
Category: Article
ISSN: 1862-6254
DOI: 10.1002/pssr.200802077

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