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Synthesis of carbon-nitride films using a fast-switched dual-source low energy ion beam deposition system

✍ Scribed by D. Marton; A.H. Al-Bayati; S.S. Todorov; K.J. Boyd; J.W. Rabalai

Book ID: 113285591
Publisher: Elsevier Science
Year: 1994
Tongue: English
Weight: 559 KB
Volume: 90
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(94)95556-5

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